Dark Field(暗場缺陷檢測)
涌淳半導體專注于半導體工藝設備的研發、制造、銷售及售后一體化服務,提供半導體廠商工藝設備的一站式解決方案。
關鍵詞:
半導體設備、半導體工藝
所屬分類:
產品描述
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
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